恒压式微流量计的研制
A constant pressure low range flowmeter
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摘要: 介绍了恒压式微流量计的设计原理和参数的选择方法,并给出了实验结果,流量测量范围为3.49~1.97×10-5Pa·L/s,不确定度小于2.25%。该微流量计己用于动态流量法校准系统和低温泵的抽速测量之中。Abstract: In this pap re the design principle and selection rules of the parameters of the constant pressure low range flowmeter are intoduced.The ezperiment results are given.The measurement range is 3.49~1.97×10-5pa·L/:,and the uncertainty is less than 2.25%·The flowmeter has been used in the dynamic flow method system for calibration and the cryopump speed measurement。