Abstract: With the development of integrated electronic circuits and optoelectronics the development of micro miniature stirling crydogenic and its subsystem（control system, driven system and regenerator, etc） are discussed. It is a critically important feature of the high frequency micrcminiature Stirling that the diameter or other corresponding lateral dimensions of the passageways through the perforate matrix of the regenerator be very small（10~50 microns）. Another critically important feature is that the amplitude of diaphragm vibrations be very small（10~100 microns）. Minimize the irreversibility losses associated with the equipment through the passages.