Abstract: Internal dielectric charging is one of the most important reasons for the anomalies of satellites.As an efficient method for internal dielectric charging analysis,the measurement techniques of space charge distribution within dielectric materials have been developed since 1970s,and the resolutions down to 1 μm.The understanding of charging phenomena in dielectrics has been significantly improved from information gained by charge-profile measurement.The applications in internal dielectric charging and tendencies are described.