a-C:H薄膜组成及结构

COMPOSITION AND STRUCTURE OF a-C:H FILMS

  • 摘要: 含氢非晶碳(a-C∶H)薄膜主要由SP3C、SP2C 和H 3种“元素”组成,在它们的三 元相图中,a-C∶H 薄膜具有特定的组成区域。由于IR 分析法对SP3C/SP2C 分析存在着系 统误差,因而导致所得结构偏离该组成域。通过对IR 法的结果分析发现,SP3C 含量偏高, SP2C含量偏低;a-C∶H 薄膜中SP2C 主要以非质子化形式存在,其含量可高达67%;质子 化的SP2C仅占SP2C 总量的10%左右。a-C∶H 薄膜是受到较高约束的空间立体网络结构。

     

    Abstract: Hydrogenated amorphous carbon(a-C∶H)films are composed of SP3C,SP2C and H,the composition range of dense hydrocarbon is given in their phase diagra m. There exists the errors in IR analysis in the determination of the SP3C/SP2C ratio,leading to the deviation of the determined structures from the composition range.It concluds by analyzing the IR results that IR analysis leads to the hig her content of SP3C and the lower one of SP2C,and also that SP2C exists mainly i n the form of unprotonated carbon,whose amount can be up to 67% and the amount of protonated carbon is lower(10% of the total number of SP2C atoms).The structure of a-C∶H films is the fully constrainted cross-linked network.

     

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