Abstract: The oxidation resistance properties of MoS₂ sputtered films doping Sb₂O₃/Au have been studied by X ray photoelectron spectrometry（XPS）.The results indicate that the doped films have the denser structure. The doping can improve the oxidation resistance properties of MoS₂ sputtered films and change the ratio between sulfur and molybdenum. The oxidation of MoS₂ sputtered films only occurs at the surface of the doped films of 2～ 3 molecule layers under the initial oxidation or the moisture environment.The doped films are very well protected under the initial oxidation. So the doping is a good method to resolve the oxidation problem of MoS₂ sputtered films.