Abstract: Atomic frequency standard is a typical device of quantum electronics,it was used to output stable frequency signal as time benchmark of the electronic system,it played an important role in navigation,time keeping,time service and communication.If the thin film technology was applied to the development of the atomic frequency standard,the performance and the service life of the atomic frequency standards would be improved.Firstly,we described the application of the thin film technology in the rubidium atomic frequency standard,cesium atomic frequency standard and hydrogen atomic frequency standard.For example,the thin film technology was used for optimization performance of the spectral lamp and suppression for light shift in the rubidium atomic frequency standard,these could improve the performance of the rubidium atomic frequency standard.The thin film technology was used for development of the electron multiplier and the lifetime extension of the cesium beam tubes.The thin film technology was used for extending the relaxation time of the hydrogen atom,these could improve the performance of the hydrogen atomic frequency standard.Secondly,we summarized the application of the thin film technology in the mercury ion frequency standard and miniature CPT atomic frequency standard,and we looked forward to the important role and development of the thin film technology in the next generation of space borne atomic frequency standards.