渗氦型真空漏孔漏率的温度修正

TEMPERATURE CORRECTION TO LEAKAGE RATE OF HELIUM PERMEATION LEAK

  • 摘要: 由于石英材料的渗透系数与温度成指数函数关系,因此渗氦型真空漏孔对温度非常敏感,在使用时需要对漏孔校准值进行温度修正。通过对一支渗氦型真空漏孔在16~40℃温度范围内的漏率校准,给出了漏率随温度变化的2种修正方法——指数修正法和线性修正法,以及2种方法的修正结果。

     

    Abstract: Since the permeability of glass is an exponential function of temperature,permeation leaks are very sensitive to temperature.A correction should always be made in the calibration value for the operating temperature relative to its calibration temperature.A helium permeation leak was calibrated in the range of temperature form 16 ℃ to 40 ℃.The exponential correction method and linear approximation correction method and their results are presented.

     

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