MgO薄膜的制备方法及工艺条件对薄膜特性的影响

GROWTH METHODS AND INFLEUNCE OF CONDITIONS ON PROPERTIES OF MgO THIN FILMS

摘要: 综述了MgO薄膜的主要制备方法,包括电子束蒸发、脉冲激光沉积、磁控溅射、金属有机物化学气相沉积、分子束外延和溶胶-凝胶法等。阐述了各种方法在制备MgO薄膜方面的优点和不足,重点讨论了不同的生长条件对薄膜结晶取向、表面形貌等性质的影响。

Abstract: The main methods of preparing MgO thin films,including Electron-beam evaporation,PLD,Magn-etron sputtering,MOCVD,MBE and Sol-gel were reviewed.The advantages and shortcomings of these methods in MgO film preparation are represented.The effects of different growth conditions on crystalline orientations and surf-ace morphology of MgO thin film are discussed.