AZO透明导电薄膜的制备技术及应用进展
PREPARATION AND APPLICATION OF TRANSPARENT CONDUCTIVE AZO THIN FILM
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摘要: 概述了国内外AZO透明导电薄膜的多种制备技术和开发应用进展。详细介绍了磁控溅射、溶胶-凝胶、脉冲激光沉积、真空蒸镀、化学气相沉积等工艺在AZO薄膜制备中的研究现状,并且在对AZO膜与ITO膜性能比较的基础上,指出AZO薄膜的产业化前景好。Abstract: The multiform preparation technologies and applications developments on AZO thin film are described.The current research status of magnetron sputtering,sol-gel,Pulsed laser deposition,vacuum evaporating and chemical-vapor deposition techniques applied in the preparation of AZO thin film is introduced in detail.The industrialization for AZO films in the future is more promiseful than ITO thin film.