定容式气体微流量标准装置的不确定度分析
UNCERTAINTY ANALYSIS ON CONSTANT VOLUME FLOW STANDARD
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摘要: 定容式气体微流量标准装置采用定容法工作原理,用于校准热容式质量流量计,测量范围为1×10-3~10Pa·m3·s-1,不确定度(1σ)小于1.20%。主要分析了标准装置的不确定度Abstract: The constant volume flow standard adopts the constant volume method.The standard can be used to calibrate thermal mass flow meters.The range ofthe standard is from 1×10-3 to 10Pa·m3·s-1 with uncertainty less than 1.2%.The uncertainty (1σ) of the standard is analyzed.