Abstract: The surface structure of anode Al-oxidized films in high frequency oxygen plasma as a function of oxygen exposure was studied with Auger Electron Spectroscopy（AES）.When the oxidation temporature is 350℃ and oxygen exposure is 100 L,Auger peak 56 eV concerned with oxygen can be observed. As oxygen exposure is farger than 103 L,growing rate of the oxide layer becomes slower and has steadv reflectivitv on surface of Al-roxidized films.