钛泵-不锈钢超高真空系统静态升压特性研究
STUDY OF PRESSURE RISE CHARACTERISTIC OF SEALED TITANIUM PUMP-STAINLESS STEEL UHV SYSTEM
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摘要: 由于真空器壁对气体分子的吸附作用,钛泵-不锈钢超高真空系统的静态升压特性与普通真空系统有很大不同。用通常的办法估算其漏率是行不通的。基于作者的实验结果,对这类系统的静态升压规律作了探讨,并给出了估算"真实漏率"的公式。Abstract: Because of the adsorption of gas molecules to the vacuum wall,the pressure rise characteristic of sealed titanium pump-stainless steel UHV system is very different from that of general vacuum systems.The general method of calculating leak rate is no longer valid.In this article,the pressure rise characteristic of this type of vacuum systems was studied and the equation of calculating real leak rate was put forward.All of these are based on our experiments.