溅射离子泵对N2和CO抽速的理论计算
THEORETICAL CALCULATION OF AN ION PUMP’S PUMPING SPEED FOR N2 OR CO
-
摘要: 根据潘宁放电机理,导出溅射离子泵抽速的理论公式。讨论了抽速对各种放电参数的依赖关系。计算了离子泵对N2和CO的抽速。计算结果和实验测试以及经验公式的结果有较好的符合。Abstract: According to the mechanism of the Penning discharge,deduce the theoretical formula of an ion pumps pumping speed,discuss the dependence of the pumping speed on several discharge parameters,and calculate the pumping speed for N 2 or CO.The calculating results agree well with exeperimental results and the empirical formulas.
下载: