气压对氩等离子体特性的影响
THE EFFECT OF PRESSURE ON THE ARGON PLASMA CHARACTERIZATION
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摘要: 研制了一种新的大面积微波等离子体源。由环形波导腔环绕直径30cm、高50cm耐热玻璃圆筒真空室构成。环形波导内侧开有多个狭缝用来激励产生等离子体。利用该源研究了气压对等离子体参数、击穿功率和熄灭功率的影响。Abstract: A new large area microwave plasma source has been developed. The source consists of slots on the inner side which acts as a field applicatior to sustain a plasma. The plasma is contained in a Pyrex glass cylinder with an inner diameter of 30 cm and a height of 50 cm. The source has been used to study the effect of pressure on argon plasma parameters and microwave power for plasma ignition and extinction.