温度对薄膜渗氦型漏孔漏率的影响研究

RESEARCHES ON TEMPERATURE EFFECTS ON LEAKAGE RATE OF HELIUM PERMEATING LEAK

摘要: 介绍了气体微流量标准装置对漏率的校准方法。在温度16～50℃范围内,对两支薄膜渗氦型漏孔进行了校准,并给出了温度与漏率的关系表达式。得出了研究结论。

Abstract: The calibration method of leakage rate with the gas low range standard apparatus is introduced.Two helium permeating leaks have been calibrated in the range of temperature from 16℃ to 50℃ and the relation expressions between temperature and leakage rate are presented.