掺钛对类金刚石薄膜力学性能影响研究

STUDY ON THE MECHANICAL PROPERTIES OF DIAMOND LIKE-CARBON FILMS WITH TITANIUM DOPED

摘要: 利用脉冲电弧离子镀技术制备了一系列钛含量不同的类金刚石薄膜。对样品研究发现:随着钛含量的增加(原子百分比小于5.3%),薄膜的硬度和应力都开始下降,且应力的下降幅度大于硬度下降幅度;但当钛含量继续增大时(原子百分比在5.3%和18.0%之间),薄膜的硬度继续保持下降,但薄膜的应力基本保持不变。摩擦系数在钛原子百分比含量小于6.3%时,保持不变,随着钛含量的继续增大,摩擦系数缓慢增加,但当钛含量到达一定值后,其磨损量增加,摩擦系数开始变的不稳定。

Abstract: Samples with different Ti concentration were prepared by using pure Ti target and changing the number of graphite target or using a grid before the Ti target,to adjust Ti concentration in DLC thin films.Studies shown that the hardness and stress keep decreasing with Ti concentration increased（below 5.3 at.%）.When Ti concentration keep increasing from 5.3 at.% to 18.0 at.%,the hardness keep decreasing,but the stress keep almost constant.The friction coefficient keep constant when the Ti concentration increase from 0 to 6.3 at.%,As the Ti concentration in the thin film keep on increasing,the friction coefficient increase too.