Abstract: In this paper,electromagnetic field model,ionization model and an ambipolar diffusion model are established for inductively coupled plasma source (ICPS)and the models are calculated.The results show that when an antenna geometry and inner radial of the reactor is constant,the field intensity and electron number density increases with the height decreases.When the height of reactor decreases from 12 cm to 5 cm, the peak electron concentration increased by 60 percent.