金刚石薄膜CVD制备方法及其评述
DISCUSSION ON SYNTHETIC METHODS OF DIAMOND THIN FILMS BY CHEMICAL VAPOR DEPOSITION
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摘要: 较系统地介绍了低压下化学气相合成(CVD)金刚石薄膜的主要方法,并对各种方法的优劣作了简要的评述Abstract: The main synthetic methods of the diamond thin films chemical vapor deposition are introduced;their advantage and disadvantage are compared simply.
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