ZnO薄膜的制备及p型掺杂研究进展

RECENT PROGRESS ON PREPARATION AND P-TYPE DOPING OF ZnO FILMS

摘要: 氧化锌是一种在声表面波传感器、压电器件以及太阳能电池等方面具有很好应用前景的材料。介绍了目前制备ZnO薄膜的主要方法,综述了ZnO薄膜p型掺杂的研究现状,并对ZnO薄膜的研究进行了展望。

Abstract: Zinc oxide has favorable applications in surface acoustic wave sensor, piezoelectric device, solar cell and other fields. This paper presents the main preparations of ZnO films and review investigation situation of p-type doping ZnO films, also the work of ZnO films is prospected.