常压检漏的多种示漏气体分析仪的研制

THE DEVELOPMENT OF AN ANALYSIS EQUIPMENT WITH MULTIPLE SHOWING GAS SUTABLE FOR LEAK DETECTING IN ATMOSPHERE

摘要: 介绍了一种以四极质谱计为核心的适合在常压下检漏的多种示漏气体分析仪的结构、工作原理、设计方案、试验方法、试验结果。该仪器具有在大气压下检测He浓度为1×10^-9、Ne浓度为2×10^-7、CF4浓度为1×10^-9的能力。

Abstract: This paper describes the structure, working theory, design scheme, experiment method and experiment results of a multiple showing gas leak detection equipment consisting mainly of quadrupole mass spectrum, which s suitable for leak detecting in atmosphere.It can detrct He at the concentration of 1×10 ^-9,Ne at the concentration of 2×10 ^-7,and CF₄ at the concentration of 1×10 ^-9.