四级差分真空系统压力分布计算
PRESSURE DISTRIBUTION CALCULATION OF FOUR-STAGE DIFFERENCE VACUUM SYSTEM
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摘要: 介绍了与差分真空系统相等效的电子学电路,用PSpice仿真计算四级差分真空系统各级真空室压力分布,得到了4号真空室的理论压力,并和实验结果作比较,得出了可以用等效电子电路模拟计算真空系统中压力分布的结论。Abstract: The difference vacuum system’s equivalent circuit is introduced,and electrical network analogy method(PSpice) is used to simulate the pressure distribution of four-step difference vacuum system.In the end,a comparison between the simulation results and the experimental results is drawn.In conclusion,PSpice is a good way to simulate the pressure distribution in a complex vacuum system.