用气体微流量标准装置校准参考漏孔

REFERENCE LEAK CALIBRATION WITH GAS FLOW STANDARD APPARATUS

摘要: 介绍气体微流量标准装置用比较测量法和直接测量法校准漏孔的方法,并给出漏孔的核准结果。该标准装置的校准范围为17~1×10^-5 Pa·L/s,不确定度小于2%。

Abstract: In this paper,two leak calibration methods, the measurement method and the directmethod. are described.The results of leak calibration are given. By gas flow standard apparatus, thereference leak in 17~1×10^-5 Pa·L/s range can be calibrated with uncertainty less than 2%.