大型钛薄膜吸附泵的抽速测试装置
A PUMPING SPEED MEASUREMENT APPARATUS FOR THE LARGE Ti-FILM GETTER PUMP
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摘要: 叙述了2×105L/s钛升华泵的一种抽速测试方法,介绍了实验原理和测试装置设计。Abstract: This paper describs a pumping speed measurement method for the 2×105L/s Titanium sublimation pump,Its experiment principle and measurement apparatus are mentioned.
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