(Pb1-xSrx)TiO3系薄膜铁电性能的工艺因素研究

(Pb_1-xSr_x)TiO₃系薄膜铁电性能的工艺因素研究

摘要: 钛酸锶铅((Pb₁-_xSr_x) TiO₃)薄膜是一种重要的铁电薄膜,应用潜力很大,是高新技术研究的前沿和热点之一。通过磁控溅射的方法制备了PST薄膜,详细研究了不同工艺因素对PST薄膜铁电性能的影响。结果表明,选择合适的工艺条件可以制备铁电性能优良的钙钛矿相PST薄膜。

Abstract: (Pb_1-xSr_x)TiO₃ （PST） film, as an important ferroelectric film, has become an extensively studied subject of much basic and technological interest. The PST ferroelectric films were fabricated by magnetron sputtering. The problems of technology connected with ferroelectric properties of PST films have been analysised particularly. The results showed that the PST thin films would possess the perovskite phase and excellent ferroelectric properties with proper technology.