磁控溅射制备VO2热致变色薄膜的研究
THE STUDY ON VO2 THERMOCHROMIC FILMS PREPARED BY RF MAGNETRON SPUTTERING
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摘要: 研究了用磁控溅射制备VO2热致变色薄膜。在不同的O2/Ar+O2流量比下,沉积了一系列VOx薄膜,给出了沉积速率以及高温/低温下电阻率变化的规律。得到了组分比较纯的VO2热致变色薄膜。研究了薄膜的光透射谱和相变过程中电学性质的变化。Abstract: VO2 thermochromic films were prepared by the magnetron sputtering method. The effects of sputtering parameters on the optical/electrical properties of VO2 films were studied. The transitional properties of VO2 films were characterized by the electrical resistance change in the phase transition process.
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