离子束清洗对光学太阳反射镜(OSR)性能的影响研究

INFLUENCE OF ION BEAM CLEANING ON PROPERTIES OF OPTICAL SOLAR REFLECTOR

摘要: 主要通过调整离子束清洗时间、清洗气氛、清洗功率(电流)等工艺参数,并结合OSR的膜层附着力测试以及光学性能测试,研究了离子束清洗各工艺参数对OSR性能的影响。结果表明,离子束清洗可以显著提高OSR的膜层附着力。

Abstract: In this paper, Influence of ion beam cleaning on properties of Optical Solar Reflector （OSR） was studied by adjusting ion beam cleaning parameters and testing adhesion and optical properties of OSR. The result revealed that ion beam cleaning can improve film adhesion properties of OSR.