S—枪磁控溅射源的研制及其特性
The study and properties of S-gun magnetic control spatter source
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摘要: S-枪是一种先进的真空溅射镀膜器件,可用于进行多种真空镀膜工艺。详细介绍了研制S-枪的结构状况及其工作特性。Abstract: S-gun is a kind of advanced vacuum spatter coating devices It can be used to carry on many vacuum coating technology.This article introduces the study of structure state and operation propertics of S-gun.
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