真空自动控制基础
The basis of vacuum automatic control
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摘要: 介绍了真空自动控制的基本概念、名词术语、真空自动控制的基本规律,以及真空自动控制系统的构成、分类和要求。Abstract: This paper introduced the fundamental concepts and technolo-gical nouns and terms about the vacuum automatic control,also introduced the eonstitution,classification and property requirements of the vacuum automatic control system.