小孔流导测量方法的研究

STUDY ON MEASUREMENT METHOD OF SMALL ORIFICE CONDUCTANCE

  • 摘要: 在分子流条件下,给出了定容法和恒压法测量流导的方法,分析了测量不确定度。采用定容法气体微流量校准装置和恒压法气体微流量校准装置分别对小孔流导进行了测量,对2种测量方法进行了比对,一致性好于1.0%。

     

    Abstract: Two methods of measuring conductance are introduced under the condition of molecular flow,namely,with constant volume method and constant pressure method.The measurement uncertainty is also analyzed.The small orifice conductance is measured with calibration apparatus of constant volume and calibration apparatus of constant pressure.The comparison of two measurement methods are done.The two agree fairly well,the difference is less than 1.0%.

     

/

返回文章
返回