Abstract: A novel method as Sputter Gas Aggregation（SGA） co deposition for metal/metal（insulator） cluster embedded film prepartion was produced in this paper,and series of Fe/Ag and Cu/CaF ₂ cluster embeded films were prepared on farmvar foil by this method.TEM analysis showed that Fe（Cu） clusters are well encapsulated in Ag（CaF ₂） coatings and in multi crystal form in the deposited samples.More detailed analysis showed that compared with that of bulk materials,the lattice constant of Fe clusters was shrinking and that of Cu cluster was expanding in different degree.A simple mode wsa proposed to explain this phenomina.