Abstract: The adsorption pump is the former pump,The iron pump is the ma in part of the oil free vacuum system.The vacuum degree is judged as criterion by computer automatically to heated the apparatus.Oil free high vacuum system,control system,heat system,it’s power and the control program have been introduced.The system can analyze the gas spectrum and charge gas.The vacuum limit reach 8×10^-7 Pa.The heat temperature is from room temperature to 600 ℃.The constant temperature overmatch ±1%.The analyze mass number is from 1 to 80.The system design reasonably operate simply.Due to the computer control,precise co ntrol actor have been used.The artificial factor have been removed.