影响TiO2薄膜表面形貌的因素
RESEARCHES ON SURFACE FORM FACTORS OF TiO2 THIN FILM
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摘要: :通过电子显微镜的观察,得到了TiO2表面形貌的分布、大小、形状等,并就影响TiO2薄膜表面形貌的主要因素,如温度、基片种类、退火温度等进行了研究。实验得出:在350～600℃温度制备的薄膜表面粒子分布均匀、大小一致Abstract: The surface distribution,size and shape of TiO2 thin film are observed through SEM.The main factors affecting TiO2 thin film,as temperature,annealing temperature,wafer kinds are studied.It is shown that the temperature about 350～600℃ is good for preparing TiO2 thin film.
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