电弧侧面金刚石薄膜的沉积

DIAMOND FILMS SYNTHESIS BESIDE THE ARC JET

摘要: 利用磁约束直流等离子体炬设备和Ar+H₂+CH₄混合气体,在喷出的电弧侧面的无水冷的AlN(氮化铝陶瓷)衬底上,成功的制备出金刚石薄膜。使用扫描电子显微镜、X射线衍射仪和Raman光谱研究了金刚石薄膜形貌、生长速率及质量。

Abstract: Diamond films were synthesized by using a magnetized DC plasma jet with argon（Ar）,hydrogen（H ₂） and methane（CH ₄） on AlN substrate without water cooling.The feature,growth rate and quality of the films were studied by scanning elactron microscopy,X ray diffration and Raman spectroscopy.