ZnO薄膜的结构、性能及其应用
APPLICATION AND PROPERTIES OF ZnO THIN FILM
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摘要: 从ZnO薄膜的晶体结构、光学性能、电学性能、光电特性、气敏特性等方面综述了ZnO的研究重点和应用前景。Abstract: Research points and application prospects of ZnO film are reviewed in terms of its crystal structure,optical property,electrical property,photo-electricity and sensing properties.