真空计量的需求与发展
REQUIREMENT AND DEVELOPMENT OF VACUUM METROLOGY
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摘要: 综述了对真空计量的需求与发展,其中包括对全压力、分压力、气体微流量、真空泵抽速、空间真空测量和特殊条件下对真空测量的需求,还包括对真空计量标准和测试设备的需求。Abstract: The requirement and development of vacuum metrology are summarized.The requirements for the total/partial pressure,gas micro-flow,vacuum measurement of space/special condition,as well as requirements for vacuum metrology standards and test equipment are included.