石英管内表面镀膜方法的研究
STUDY ON COATING METHOD ON INNER SURFACES OF QUARTZ TUBE
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摘要: 给出了在石英玻璃管内表面上镀膜的一种方法,并对镀膜工艺参数和影响膜质量的一些因素进行了讨论。Abstract: A method for coating the inner surface of quartz tubes is introduced and the coating technique and some factors which will influence the quality of the film are discussed.
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