减压法制备TIO2薄膜的研究
STUDY ON LOW PRESSURE PREPARED TiO2 THIN FILM
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摘要: 主要研究了减压法制备T I O2薄膜过程中氧气及水的变化对薄膜沉积率的影响;对TIO2薄膜生长反应动力学进行了研究。为制备优制T I O2薄膜奠定了基础。Abstract: In this paper,TiO2 thin film prepared by LPCVD and the effect of O2 and H2O pressure change on the film deposited rate were studied,meanwhile TiO2 thin film prepared in reaction kinetics was discussed.The theoretical basis for preparing quality TiO2 thin film is established.
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