残气质谱分析在LAS-2000上的应用

THE METHODS OF RGA USED IN LAS 2000

摘要: 详尽地探讨高真空及超高真空中的残余气体的质谱分析方法。运用这些方法在LAS-2000二次离子质谱仪上进行了应用研究。精确地分析了LAS-2000的本底真空,发现其超高真空中含有较多的碳氢化合物,这些碳氢化学物主要影响氢(氘)轰击石墨的化学腐蚀研究的结果分析。

Abstract: The methods of RGA has been studied and applied to LAS 2000 SIMS.Accurately analysed the partial pressure of LAS 2000 SIMS background vacuum,and found there have some hydrocarbons,which mainly affect the analysis of chemical sputtering of graphite bombarded with H(D) ion beam.