透明导电CdIn2O4薄膜光学常数的计算

DETERMINATION OF OPTICAL CONSTANTS FOR TRANSPARENT CONDUCTIVE CADMIUM INDIUM OXIDATE THIN FILMS

  • 摘要: 针对射频反应性溅射Cd-In合金靶沉积的透明导电CdIn2O4薄膜可见光区和近红外透射区透射和反射谱,分别采用包络线法迭代计算和Szczyrbowski提出的非均匀膜模型计算出了薄膜的光学常数。根据Drude理论求出了自由载流子有效质量,并与通过等离子体波长λp所确定的有效质量进行了比较。

     

    Abstract: According to the transmission and reflection spectra in the visible and near IR regions of the transparent conductive cadmium indium oxidate thin film deposited by RF reactive sputtering from Cd In alloy target,the optical constants of film is determined by using the iterative method on the envelope line and the model about the optically inhomogeneous film presented by Szcyrbowski J, respectively.The effective mass of the free carrier can be calculated on the basis of classical Drude theory,and compared to that determined from the plasma wavelength λp.

     

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