12位清洁开关管真空排气系统
A 12 WORKING UNITS VACUUM EXHAUST SYSTEM OF CLEAN VACUUM SWITCHING TUBE
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摘要: 这个系统是真空开关管的真空排气系统。由机架、主真空室、12支预抽管路、超高真空插板阀和ZDB-250型低温泵组成。经过半年的运转系统工作正常。Abstract: This system is used to vacuate and exhaust vacuum switching tube. It consists of a body frame,a main vacuum chamber,12 branchs fore pumping vacuum pipes,an ultra high sluice valve and a ZDB-250 type cryogenic pump.Runing for half year,the whole system has proved to be functionally good.