空间微机电系统的研究与进展

RESEARCH AND DEVELOPMENT OF MICRO ELECTRO MECHANICAL SYSTEMS FOR SPACE APPLICATIONS

摘要: 介绍了微机电系统的基本原理及其在空间应用的发展概况,着重介绍了空间微传感器、微执行器、RF-MEMS、MOEMS、微仪器和微/纳卫星的研究与进展情况。

Abstract: The basal principles and space applictions of Micro Mechanical Systems are introduced. The detailed status in the research and development of micro sensors, micro actuators, RF-MEMS, MOSEMS, micro devices and micro/nano satellites are presented.