大面积等离子体聚合装置的研制
DEVELOPMENT OF LARGE AREA PLASMA POLYMERIZATION FACILITY
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摘要: 通过在原有射频放电平行平板等离子体聚合装置上增加卷绕机构,实现了大面积等离子体聚合镀膜。膜的最宽可达200mm,镀膜速度可在0.01~5.00mm/s范围内调节,薄膜可以正、反方向运动。Abstract: Large area plasma polymerization has been carried out by installing a set of convolution framework in the RF plasma polymerization facility. The width of film reaches to 200 mm. The velocity can be adjusted in the range of 0.01~5.00 mm/s. The film can be moved in positive direction and in reverse.