溅射离子泵抽气系统的B—A计检漏

详细信息

LEAK DETECTION OF SPUTTER ION PUMPED SYSTEM WITH B-A GAUGE

摘要: 给出了以大气中各气体组分的漏率为基础的检漏灵敏度公式,分析了获得高灵敏度的条件,提出了选择示漏气体的综合依据。计算表明,用氩作示漏气体检溅射离子泵系统的灵敏度很高,足以保证系统的漏气率远小于系统自身的放气率。给出了10^-8 Pa压力下的检漏结果,其理论值与实测结果很好地一致。
- B-A计 ;
- 检漏 ;
- 溅射离子泵
Abstract: The formulas of leak sensibility based on the leak rates of the atmospheric partial pressures are given.The conditions to obtain the high leak sensibility are analyzed and the synthe-tical factors to select the detectable gas is proposed.It is shown from the calculation that argon is a very sensitive gas for detecting the leak of the sputter ion pumped system and it is sensitive enough to assure the leak rate of the detected leak much less than that of the gas release of the system. The detection result under 10^-8 Pa is also given，which is in good agreement with the theory.
- B-A gauge /
- Leak detection /
- Sputter ion pump