锐钛矿型二氧化钛薄膜制备及其光催化性能研究

PREPARATION AND PHOTOCATALYTIC ACTIVITY STUDIES OF ANATASE-PHASED TiO₂ THIN FILMS

摘要: 在室温下采用直流磁控反应溅射法制备纳米TiO₂薄膜,用XRD、XPS等手段对未退火及不同退火温度处理的薄膜进行了研究,以紫外灯为光源对亚甲基兰进行了光催化降解试验。结果表明:室温制备未退火的薄膜为非晶结构,400～500℃退火的薄膜为锐钛矿相结构。制备的锐钛矿型TiO₂薄膜具有一定的光催化性能,在500℃退火2h且厚度较大的薄膜光催化性能较好。

Abstract: TiO₂ thin films were deposited by direct c urrent （dc）magnetron reactive sputtering with out external heat-ing.The films were investigated using X -ray diffraction（XRD）and X -ray photoelectron spectroscopy（XPS）.The photo-catalysis activity of the samples wa s tested on the degradation of methylene blue solution under the irradiation of UV lamp.The results show that when annealed betw een 400℃and 500℃for two hours,the am orphous TiO 2 films change to anatase phase.Anatase -phased TiO₂ films show photocatalysis property and the thicker samples annealed at 500℃have better photocatalysis activity.