真空镀膜玻璃技术的新成就
NEW ACHIEVEMENT IN THE FIELD OF TECHNOLOGY ABOUT COATED GLASS WITH MAGNETRON SPUTTERING
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摘要: 孪生磁控和旋转磁控阴极相对于平面磁控阴极的优势及对镀制Low-E膜及ITO膜的贡献Abstract: In this paper,low-E and ITO films prepared by using the advantage of the twinmag and c-mag cathode are discussed and compared to planar magnetron cathode
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