HL-1M装置硼化膜的研究

STUDY OF a-B/C:H FILMS DEPOSITED IN HL-1M TOKAMAK

摘要: HL-1M装置采用C₂B₁₀H₁₂蒸气对真空室内壁进行了原位硼化,取得了满意的效果。采用沉积探针技术并结合四极质谱分析技术对膜的成分、热解释性能、D⁺束辐照化学腐蚀性能、HL-1M装置第一壁成膜的平均速率和膜厚的均匀度以及硼化前后的碳、氧杂质和放电期间器壁再循环特性进行了研究。

Abstract: Boronization has been performed in the HL-1M tokamak by glow discharge in He+C ₂B ₁₀ H ₁₂ mixed gases.The characteristics of a-B/C:H film coated on the inner wall of the vacuum chamber have been investigated with irradiated samples,including the film contents,thermal release of the absorbed H 2 and chemical erosion caused by D ⁺ beam etc.