常温下合成金刚石薄膜

SYNTHETICS OF DIAMOND THIN FILMS AT ROOM TEMPERATURE

摘要: 采用射频辉光放电的方法在含CH的混合气体的常温条件下制备了含碳的薄膜,通过Raman、XRD和SEM分析,检验了薄膜的性质,表明此膜含有大量的碳的SP³键的金刚石成分,其晶粒为10～ 10 0nm,属于纳米金刚石膜。此膜已在玻璃镜片、塑料和磁盘等商品的保护方面获得了广泛的应用

Abstract: The coatings were synthesized with gas mixture of containing CH precursor at room temperature by glow discharge.The properties of the coatings were analyzed and tested by Raman,XRD and SEM.It showed that the coatings contained an amount of SP³ carbon phases and of the grains of 10～100 nanometers may belong to nanoparticle diamond.The coatings are widely used in protecting glasses,plastics and disks and so on.