降低超硬类金刚石薄膜应力的方法

THE METHODS OF REDUCING INTRINSIC STRESS OF SUPERHARD DIAMOND-LIKE CARBON FILMS

摘要: 在参考他人最近十几年研究的基础上,总结了降低超硬类金刚石薄膜内应力的几种方法,包括热退火、掺杂、加脉冲偏压、沉积多层膜等。退火在降低应力的同时可保持类金刚石薄膜很高的硬度,其他各种方法在降低应力时都以降低一定的硬度为代价。

Abstract: Methods,such as annealing,doping,adding pulse bias,depositimg multilayer et al,which could reduce stress in DLC films,had been reviewed.The stress could be reduced and the hardness is stable following annealing.However,the other methods reduced stress by sacrificing the hardness of the films.