ITO透明导电薄膜XPS深度剖面分析
ANALYSIS ON DEPTH PROFILES OF ITO TRANSPARENT CONDUCTIVE FILMS BY XPS
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摘要: 介绍了镀制SiO2的ITO透明导电薄膜的性能特点，描述了用X射线光电谱仪对典型产品深度剖面的分析过程，给出了实验结果。Abstract: The properties of ITO transparent conductive films coated with SiO2 are introduced.The process of analysis on the depth profiles of the samples by XPS is described and the results are given.
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