Abstract: The application of OVPD（Organic Vapor Phase Deposition） technique in evaporation equipment for OLED（Organic Light-Emitting Diode） was introduced.The experiment equipment was manufactured,to approve its feasibility and controllability.Compared with conventional evaporation,OVPD has the following advantages: high utilization of organic material,good uniformity of film thickness,larger substrate etc.This technique established the process foundation for the OLED yield equipments.